"Defining the boundary between math and matter. Ensure your GDSII layouts comply with our agile foundry constraints to ensure high-yield fabrication."
Critical Fabrication Constraints
| Parameter | Limit / Range | Remarks |
|---|---|---|
| Minimum Feature Size (CD) | 10 nm | Material dependent (TiO2/Si) |
| Minimum Gap (Trench) | 15 nm | Aspect ratio restricted |
| Side Wall Angle | 88° - 92° | Optimized for Metalens |
| Max Etch Depth | 1.5 μm | High-selectivity ICP process |
| Overlay Accuracy | < 20 nm | EBL Multi-layer alignment |
| Substrate Sizes | 1cm x 1cm to 4" | Custom shapes supported |
AKESO ntnb Fabrication Standards